TGXYZ03 ÆǸŴÜÀ§ TGXYZ03 Mounted on 12mm round metal plate TGXYZ03/NM Unmounted (chip only, no plate)
AFM XYZ calibration grating, 500nm step height, 5µm and 10µm pitch arrays The TGXYZ03 is an AFM calibration standard of the TGXYZ series that features:
• 500¡¿500µm square with 5µm pitch arrays pf circular pillars and holes, as well as lines in the X and Y direction • 1¡¿1mm square with 10µm pitch arrays of square pillars and square holes • step height in the range of 500nm
MikroMasch offers versions of the same calibration standard with 20nm step height (TGXYZ01) and 100nm step height (TGXYZ02).
For more detailed information on the TGXYZ series AFM calibration standards please check the TGXYZ General Description

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